Patent · US Expired

Process for depositing a tungsten-based and/or molybdenum-based layer on a rigid substrate, and substrate thus coated

US6383566B1 · kind B1 · utility

538Cited by
4References
17Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJun 30, 2000
Grant dateMay 7, 2002
Priority date
Expiry dateJun 30, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T428/265
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

The present invention is directed to a process for depositing at least one layer (3) based on tungsten and/or on molybdenum by chemical vapor deposition on a non-conductive substrate (1), such as glass, ceramic, glass-ceramic, or polymer, which includes providing at least one tungsten- and/or molybdenum-containing precursor in the form of a metal halide and/or of an organometallic compound, and at least one reducing agent, such as hydrogen or silane, to form the at least one metal layer. The present invention also relates to the substrate obtained by the preceding process and its applications, especially for producing a glazing, mirrors, or emissive screens.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.