Probing of surface roughness
US6383816B1 · kind B1 · utility
5Cited by
5References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1999 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Nov 9, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for assessing a surface finish on a substrate. The method applies molecules that have an interaction with the substrate to the substrate. Then illuminating the surface of the substrate and monitoring the molecules on the surface of the substrate to determine the finish of the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.