Optical component having a chemically etched guide with a ridge structure and its method of manufacture
US6383830B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2001 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Feb 22, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12119
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention concerns an optical component having at least one guide with a ridge structure obtained by chemical etching on a substrate made of semiconductor material, the ridge having a base and a top face, the guide having an outline with at least one curved section, the tangent at any point on the outline defining the local orientation (&bgr;) of the guide. According to the invention, the width of the base (weff) of the ridge is substantially constant all along the guide and the width of the top face (w) of the ridge varies according to the local orientation (&bgr;) of the guide with respect to the reference crystallographic direction (R) of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.