Electrostatic microactuator with offset and/or inclined comb drive fingers
US6384510B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 2000 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Apr 12, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B11/10563
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electrostatic microactuator comprising a substrate and at least one comb drive assembly having a first comb member mounted on the substrate and a second comb member overlying the substrate. The first comb member has a plurality of first comb fingers. The second comb member has a plurality of second comb fingers. The second comb member is movable between a first position in which each second comb finger is not substantially fully interdigitated with an adjacent pair of first comb fingers and a second position in which each such second comb finger is substantially fully interdigitated with such adjacent pair of first comb fingers. Each of the second comb fingers is offset relative to the midpoint between the adjacent pair of first comb fingers when in the first position and is substantially centered on such midpoint when in the second position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.