Vertical comb drive actuated deformable mirror device and method
US6384952B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 27, 1998 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Mar 27, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12104
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A deformable mirror includes a vertical comb actuator having a reflective surface attached thereto. The vertical comb drive includes stationary elements interspersed with moving elements. When a potential difference is provided between these elements, the moving elements are pulled downward, thereby deforming the reflective surface. The vertical comb drive typically includes a plurality of actuators, which are individually electrically addressed. Each actuator may be an array of interspersed elements or a cavity and corresponding tooth. Springs support the moving elements and bias the reflective surface in an original position. The vertical comb drive provides a large stroke and substantially linear voltage-versus-displacement curve throughout the stroke.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.