Micro-dynamic optical device
US6384953B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 2000 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Aug 10, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is an optical modulating device capable of use as a light-valve, display, optical filter or Fabry-Perot cavity, for example. The device lends itself to batch processing, and is compatible with monolithic integration with silicon, silicon-germanium, silicon-on-sapphire (SOS) or silicon-on-quartz (SOQ) advanced microelectronic technology (NMOS, PMOS and CMOS) for integrated control circuitry, electrical addressing, system interfacing, and the like. The device forgoes the complexities of liquid crystal constructions, and avoids the need to position and fix piezoelectric spacers within layers of the device. The invention includes first and second transparent layers that are disposed to oppose one another. Metallic layers are disposed upon the inwardly facing surfaces of the transparent layers and these are arranged to oppose each other. Spectral coupling layers are disposed upon the outwardly facing surfaces of the transparent layers opposite of the metallic layers. Electrodes are disposed upon the inwardly facing surface of the first and second transparent layers. An optical cavity is created between the metallic layers, and voltage is applied to the opposing electrodes to a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.