Air bearing slider and manufacturing method therefor
US6385011B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1999 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Apr 30, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/6005
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An air bearing slider embodiment of the present invention includes a body portion having an air bearing surface (ABS) side and a flexure surface side. The ABS side has at least one air bearing surface and at least one recessed area. A thin film composed of a compressive force material is deposited within the recessed area. The compressive force material produces an omnidirectional outward force within the recessed area that creates a positive crown and camber. Preferably, the thin film has a thickness range from 10 nm to 200 nm, and is composed of diamond-like carbon (DLC). An alternative air bearing slider includes a body portion with an ABS side and a flexure surface side. A thin film composed of a tensile force material is deposited upon said flexure side. The tensile force material creates an onmidirectional inward force on the flexure side which results in positive crown and camber. The manufacturing method for the improved sliders utilizes semiconductor processing techniques. The basic slider body is appropriately masked and etched to create the air bearing surfaces, air pressure surfaces and recessed area of the ABS side. Thereafter, the compressive material thin film is dep…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.