Monolithic miniature accelerometer
US6386035B2 · kind B2 · utility
9Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2001 |
| Grant date | May 14, 2002 |
| Priority date | — |
| Expiry date | Apr 10, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A monolithic miniature accelerometer machined in a plate of material, comprising a fixed part, two first mobile mass parts referred to as inertial masses, two hinge blades each having one end fastened to one of the two mobile mass parts, and two resonators each having one end fastened to one of the two mobile mass parts, a third mobile mass part fastened to the other end of each of the two resonators and of each of the two hinge blades, and a flexible stem situated between the first two mobile mass parts and connecting the third mobile mass part to the fixed part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.