Method of actuating MEMS switches
US6388359B1 · kind B1 · utility
66Cited by
16References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 3, 2000 |
| Grant date | May 14, 2002 |
| Priority date | — |
| Expiry date | Mar 3, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0042
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A switching signal having multiple sequential pulses is applied to a MEMS switch. A first pulse moves the switch from a first switch position toward a second switch position. After a selected dwell period, a second pulse is applied to dampen ringing or overshoot of the movable portions of the switch. In a further embodiment, non-symmetrical switching signals are used to cycle the switch from the first state to the second state, and back to the first.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.