Method of manufacturing liquid crystal display device
US6388726B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 1999 |
| Grant date | May 14, 2002 |
| Priority date | — |
| Expiry date | Oct 27, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/134363
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of manufacturing a liquid crystal display device driving with fringe field between counter and pixel electrodes, by the following steps. First, by depositing a first transparent conductive layer on a transparent insulating substrate and etching the first transparent conductive layer, thereby forming a counter electrode. Second, by forming a first insulating layer as a protection layer on the substrate formed on the counter electrode. Third, by depositing a first metal layer on the first insulating layer and etching the first metal layer, thereby forming a gate bus line and a common electrode line, the common electrode line being in contact with the counter electrode. Fourth, by forming a gate insulating layer, an amorphous silicon layer and a second insulating layer on the substrate formed on the gate bus line and the common electrode line. Fifth, by etching the second insulating layer to form an etch stopper. Sixth, by forming a doped amorphous silicon layer and a second metal layer on the substrate formed on the etch stopper. Seventh, by etching the second metal layer to form source/drain and a data bus line. Eighth, by etching the doped amorphous silicon layer and the a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.