Fluid-encapsulated MEMS optical switch
US6389189B1 · kind B1 · utility
28Cited by
21References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 7, 2000 |
| Grant date | May 14, 2002 |
| Priority date | — |
| Expiry date | Mar 7, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed the rein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.