Microsensor with a resonator structure

US6389898B1 · kind B1 · utility

Assignee

• Daimlerchrysler AG · US

Inventors

• Helmut Seidel · Starnberg, DE
• Matthias Aikele · Munich, DE
• Ulrich Prechtel · Munich, DE
• Oliver Nagler · Munich, DE
• Karl Kühl · Kaufering, DE

Key dates

• Filing date: Feb 22, 2000
• Grant date: May 21, 2002
• Expiry date: Feb 22, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0817
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A microsensor with a resonator structure, which is excited by first electrical signals to oscillate and emits second electrical signals in dependence on the measuring variable, wherein a heating element, supplied with at least one of the first electrical signals, is arranged on the resonator structure for the thermal excitations of oscillations. For the thermal excitation of lateral oscillations in a microsensor with a resonator structure, the microsensor is provided at one oscillating part of the resonator structure with at least two regions that are thermally separated by a zone with reduced heat conductance, and the heating element is arranged on one of the regions. This type of arrangements permits the excitation of the resonator structure to lateral oscillations if the heating element is supplied with corresponding current pulses. It is advantageous if a receiving element is arranged on at least one of the other regions to detect the oscillation amplitude.