Chemical vapor deposition coating of fibers using microwave application
US6391396B1 · kind B1 · utility
2Cited by
5References
1Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 28, 2000 |
| Grant date | May 21, 2002 |
| Priority date | — |
| Expiry date | Nov 28, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2235/667
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Chemical vapor deposition coating is carried out in a cylindrical cavity. The fibers are heated by a microwave source that is uses a TM0N0 mode, where O is an integer, and produces a field that depends substantially only on radius. The fibers are observed to determine their heating, and their position can be adjusted. Once the fibers are uniformly heated, a CVD reagent is added to process the fibers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.