Methods of making wire grid optical elements by preferential deposition of material on a substrate
US6391528B1 · kind B1 · utility
13Cited by
26References
4Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 3, 2000 |
| Grant date | May 21, 2002 |
| Priority date | — |
| Expiry date | Apr 3, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03H2001/026
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for making wire grid optical elements by preferentially depositing material on a substrate is disclosed. Material can be preferentially deposited by directing an electromagnetic interference pattern on to a substrate to selectively heat areas of the substrate coincident with the interference pattern maxima. The substrate can then be exposed to gas phase material that is capable of preferentially accumulating on surfaces based on surface temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.