Use of scattered and/or transmitted light in determining characteristics, including dimensional information, of object such as part of flat-panel display
US6392750B1 · kind B1 · utility
3Cited by
6References
74Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 31, 1999 |
| Grant date | May 21, 2002 |
| Priority date | — |
| Expiry date | Aug 31, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Scattered or/and transmitted light is employed to determine characteristics, including dimensional information, of an object (60) such as part (10) of a flat-panel display. The dimensional information includes the average diameter of openings (62) in the object, the average density of the openings, and the average thickness of a layer (64) of the object. Light-diffraction patterns are produced to determine characteristics, such as abnormalities (146 and 148), of crossing lines (140 and 142) in such an object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.