Patent · US Expired

Apparatus for surface image sensing and surface inspection of three-dimensional structures

US6393141B1 · kind B1 · utility

9Cited by
5References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 10, 1998
Grant dateMay 21, 2002
Priority date
Expiry dateSep 10, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B11/25
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus for providing a two-dimensional image of a three-dimensional object illuminates the surface of the object using an illumination source. Portions of the surface are imaged through an aperture in a plate onto a portion of a matrix sensor. The object is rotated about its principle axis while being simultaneously translated, and, at the same time the aperture is also rotated. By synchronizing these translational and rotational movements, successive portions of the object surface can image onto respective successive portions of the matrix sensor, thereby providing an improve two-dimensional image of the surface of the object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.