Microelectromechanical dual-mass resonator structure
US6393913B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 8, 2000 |
| Grant date | May 28, 2002 |
| Priority date | — |
| Expiry date | Feb 8, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02511
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dual-mass microelectromechanical (MEM) resonator structure is disclosed in which a first mass is suspended above a substrate and driven to move along a linear or curved path by a parallel-plate electrostatic actuator. A second mass, which is also suspended and coupled to the first mass by a plurality of springs is driven by motion of the first mass. Various modes of operation of the MEM structure are possible, including resonant and antiresonant modes, and a contacting mode. In each mode of operation, the motion induced in the second mass can be in the range of several microns up to more than 50 &mgr;m while the first mass has a much smaller displacement on the order of one micron or less. The MEM structure has applications for forming microsensors that detect strain, acceleration, rotation or movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.