Angular accelerometer
US6393914B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2001 |
| Grant date | May 28, 2002 |
| Priority date | — |
| Expiry date | Feb 13, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/0888
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular accelerometer having a substrate, a fixed electrode supported on the substrate and including a first plurality of fixed capacitive plates, and a ring-shaped rotational inertia mass substantially suspended over a cavity and including a plurality of movable capacitive plates arranged to provide a capacitive coupling with the first plurality of fixed capacitive plates. A central member is fixedly attached to the substrate. A plurality of support arms extend between the central member and the ring-shaped mass for supporting the mass relative to the fixed electrode during rotational movement of the mass. The angular accelerometer also includes an input electrically coupled to the fixed electrode for receiving an input signal, and an output coupled to the mass for providing an output signal which varies as a function of the capacitive coupling and is indicative of angular acceleration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.