Electrostatic micro relay
US6396372B1 · kind B1 · utility
16Cited by
4References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 5, 2000 |
| Grant date | May 28, 2002 |
| Priority date | — |
| Expiry date | Jul 5, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0084
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A movable substrate 20 is supported on a base 10 via first beam portions 22. A movable contact 28 is supported on the movable substrate 20 via a second beam portion 23 which has an elasticity larger than the first beam portions 22.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.