Piezoelectric device, ink-jet printing head, and method for manufacturing same, and printer
US6398349B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 16, 2000 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Feb 16, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/708
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric device includes an adhesive layer composed of a material which enhances adhesion between a base plane of a piezoelectric device and a lower electrode, a diffusion preventing layer formed with a material which prevents the phenomenon of diffusion of a component of the adhesive layer into the lower electrode, wherein the lower electrode is formed over the diffusion preventing layer, a piezoelectric film formed over the lower electrode and exhibits an electromechanical transducing action, and an upper electrode formed over the lower electrode. The diffusion preventing layer prevents diffusion of titanium which is a principal component of the adhesive layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.