Method of producing a II-VI semiconductor component containing selenium and/or sulrfur
US6399473B1 · kind B1 · utility
6Cited by
4References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2000 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Jan 10, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/327
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A II-VI semiconductor component is produced with an active layer sequence having at least one II-VI semiconductor layer containing Se and/or S on a substrate. First, an Se-free II-VI interlayer based on BeTe is grown epitaxially on the substrate in an essentially Se-free and S-free first epitaxy chamber. The active layer sequence is then grown epitaxially on the Se-free II-VI semiconductor layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.