Patent · US Expired

Method of producing a II-VI semiconductor component containing selenium and/or sulrfur

US6399473B1 · kind B1 · utility

6Cited by
4References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 10, 2000
Grant dateJun 4, 2002
Priority date
Expiry dateJan 10, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S5/327
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A II-VI semiconductor component is produced with an active layer sequence having at least one II-VI semiconductor layer containing Se and/or S on a substrate. First, an Se-free II-VI interlayer based on BeTe is grown epitaxially on the substrate in an essentially Se-free and S-free first epitaxy chamber. The active layer sequence is then grown epitaxially on the Se-free II-VI semiconductor layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.