High electric field, high pressure light source
US6400089B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 9, 2000 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Dec 5, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R25/502
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of generating light comprising the step of applying an electric field to an excimer-forming gas such as a gas mixture containing noble gases and hydrogen or halogen, and providing free electrons in the gas. The electric field is configured to accelerate electrons to at least the energy required to form excimers, but in at least one region of the electric field, the field does not substantially ionize the gas, so that the field does not induce arcing through the gas. For example, electrons can be injected from one or more field emission electrodes (18) such as one or more a metal needle tip conductors, whereas the electric field can be a field between the field emission electrodes and a counterelectrode (13).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.