Emission timing control apparatus for pulsed laser
US6400741B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 31, 1999 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Mar 31, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/0428
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An emission timing control apparatus for a pulsed laser including a magnetic pulse compression circuit having a switching section for carrying out a switching operation to connect and disconnect a charging power source to and from the magnetic pulse compression circuit. The pulsed laser executes pulsed laser oscillation at a prescribed repetition frequency by turning on the switching section with a pulse oscillation synchronizing signal having the prescribed repetition frequency received from a semiconductor exposure apparatus, in which the emission timing control apparatus includes a reference delay time setting section for setting a prescribed reference delay time, and delay section for delaying a pulse oscillation synchronizing signal received from the semiconductor exposure apparatus by the time difference &tgr; calculated in the delay time calculating section and outputting to the switching section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.