Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor

US6401526B1 · kind B1 · utility

Assignee

• The Board of Trustees of the Leland Stanford Junior University · US

Inventors

• Hongjie Dai · Sunnyvale, US
• Calvin F. Quate · Stanford, US
• Robert Chen · Palo Alto, US

Key dates

• Filing date: Dec 10, 1999
• Grant date: Jun 11, 2002
• Expiry date: Dec 10, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/876
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

Single-walled carbon nanotube (SWNT) probe-tips for atomic force microscopy (AFM) are realized by direct synthesis of SWNTs on silicon pyramids integrated onto AFM cantilevers. The growth of SWNT tips involves dip coating of silicon pyramids with a liquid phase catalyst followed by chemical vapor deposition (CVD) using methane. Van der Waals interactions between the silicon pyramidal surface and the nanotube ensure proper SWNT orientation. Production of large scale arrays of nanotube probe tips using contact printing and controllably shortening nanotubes in an inert discharge are also described.