Ink jet recording head and manufacturing method therefor
US6402971B2 · kind B2 · utility
3Cited by
17References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 28, 1999 |
| Grant date | Jun 11, 2002 |
| Priority date | — |
| Expiry date | Jan 28, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The method for manufacturing an ink jet recording head includes forming an ink pool for supplying ink to a nozzle for jetting ink on a substrate. The method also includes forming, in sequence on the substrate, a diaphragm for pressurizing ink in the ink chamber, a piezoelectric thin film serving as a pressurization source for the diaphragm, and an electrode for the piezoelectric thin film. Patterning of both the piezoelectric thin film and the electrode is done at the same time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.