Process for depositing layers of zirconium oxide using soluble powders

US6403161B1 · kind B1 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Peer Löbmann · Würzburg, DE
• Walther Glaubitt · Würzburg, DE
• Dieter Sporn · Würzburg, DE

Key dates

• Filing date: Aug 25, 2000
• Grant date: Jun 11, 2002
• Expiry date: Aug 25, 2020

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C03C2218/113
• WIPO field: Materials, metallurgy
• WIPO sector: Chemistry

Abstract

A sol-gel process for producing layers of zirconium oxide is described which comprises the following stages:(i) production of a soluble, zirconium-containing powder by:(a) reaction of a zirconium alcoholate of the general formula Zr (OR)4, in which the residues R are the same or different and represent straight-chain, branched or cyclic alkyl or alkenyl residues with 1 to 10 carbon atoms, which optionally exhibit one or more carbonyl and/or ester and/or carboxyl functions, with one or more polar compounds having complexing, chelating properties,(b) heating the solution,(c) mixing the solution with water, optionally in the presence of a catalyst,(d) concentrating the solution until a powder is obtained,(ii) dissolving the powder forming a sol,(iii) coating a substrate with the sol, and(iv) annealing the coated substrate.