Adhesion resistant micromachined structure and coating
US6404028B1 · kind B1 · utility
16Cited by
4References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2000 |
| Grant date | Jun 11, 2002 |
| Priority date | — |
| Expiry date | Feb 17, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/11
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for fabricating an adhesion-resistant microelectromechanical device is disclosed wherein amorphous hydrogenated carbon is used as a coating or structural material to prevent adhesive failures during the formation and operation of a microelectromechanical device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.