Piezoelectric actuator
US6404108B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 1998 |
| Grant date | Jun 11, 2002 |
| Priority date | — |
| Expiry date | Dec 23, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H57/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A piezoelectric actuator includes a main driver electrode 4 and a sensor electrode 5. A feedback signal is generated from the sensor electrode 5 in order to eliminate a primary vibration mode due to a primary resonance frequency. The main driver electrode extends to a fixture portion of the actuator, the fixture portion being fitted into a support member 11. The extending portion of the main driver electrode eliminates the electromechanical coupling against a secondary vibration mode due to a second resonance frequency. Features of the piezoelectric actuator suppress the resonance phenomenon, thus improving the response characteristics of the actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.