Patent · US Expired

Microwave tunable filter using microelectromechanical (MEMS) system

US6404304B1 · kind B1 · utility

56Cited by
6References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 8, 2000
Grant dateJun 11, 2002
Priority date
Expiry dateMar 8, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01P1/20327
  • WIPO fieldTelecommunications
  • WIPO sectorElectrical engineering

Abstract

A microwave tunable filter having some advantages as follows: a) the integration of MEMS tunable filter and MMIC; b) the very low signal transmission loss and low dispersion; and c) the drastic variation and linear characteristic of frequency by means of MEMS capacitor and an external control signal. The microwave tunable MEMS filter includes a plurality of unit resonant cells, each unit resonant cell being formed by various serial and parallel combination of an inductor, a capacitor, a transmission line, and a variable MEMS capacitor, whereby capacitance variation of the variable MEMS capacitor in the unit resonant cell converts a resonant frequency of the unit resonant cell to thereby convert a center frequency of the filter.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.