Microwave tunable filter using microelectromechanical (MEMS) system
US6404304B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 8, 2000 |
| Grant date | Jun 11, 2002 |
| Priority date | — |
| Expiry date | Mar 8, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P1/20327
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A microwave tunable filter having some advantages as follows: a) the integration of MEMS tunable filter and MMIC; b) the very low signal transmission loss and low dispersion; and c) the drastic variation and linear characteristic of frequency by means of MEMS capacitor and an external control signal. The microwave tunable MEMS filter includes a plurality of unit resonant cells, each unit resonant cell being formed by various serial and parallel combination of an inductor, a capacitor, a transmission line, and a variable MEMS capacitor, whereby capacitance variation of the variable MEMS capacitor in the unit resonant cell converts a resonant frequency of the unit resonant cell to thereby convert a center frequency of the filter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.