Optical apparatus and microscope
US6404545B1 · kind B1 · utility
10Cited by
3References
21Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 6, 2000 |
| Grant date | Jun 11, 2002 |
| Priority date | — |
| Expiry date | Sep 6, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical apparatus and a microscope are designed so that high resolution and a high sectioning effect are provided; a time for obtaining an output image can be reduced; it is possible to observe the interior of an object in which light is strongly scattered, without using the fluorescent pigment; resistance to vibration is strong and observations can be carried out with high resolution; and a lamination structure of an IC pattern configured on a semiconductor wafer can also be observed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.