Fluid-encapsulated MEMS optical switch
US6404942B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 19, 1999 |
| Grant date | Jun 11, 2002 |
| Priority date | — |
| Expiry date | Oct 19, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3596
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 &mgr;m wide and 2 &mgr;m thick, resulting in shorter actuation distances of approximately 15 &mgr;m. This feature results in an optical switch having faster switching times.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.