Method and apparatus for performing chemical analysis using imaging by scanning thermal microscopy
US6405137B1 · kind B1 · utility
7Cited by
6References
38Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 30, 1997 |
| Grant date | Jun 11, 2002 |
| Priority date | — |
| Expiry date | Dec 30, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/867
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Sub-micron chemical analysis of the surface and sub-surface of a sample material is performed at, above or under atmospheric pressure, or on for a sample material submerged in a substance. A thermal and/or topographic image of the surface of the sample material is obtained. A location for study is selected using the image. The activation device is positioned over the selected location and surface and/or sub-surface products are ablated, desorbed or decomposed from the sample material to a chemical analyzer for analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.