Apparatus for reducing vibration inputs to a device and/or for micropositioning
US6405533B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 10, 2000 |
| Grant date | Jun 18, 2002 |
| Priority date | — |
| Expiry date | Jan 10, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/41345
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Apparatus for compensating for positioning, pointing and/or orientation errors caused by deflections of structural members and components of a high performance machine or device and/or for reducing vibration inputs to such machine or device and/or for micro-positioning such machine or device so as to improve the operational performance of such machine or device. The apparatus utilizes one or more active-type actuators, such as piezoelectric ceramic type actuators, which are arranged in a predetermined manner relative to the machine or device. A servo control device operating in accordance with a predetermined algorithm may be utilized for controlling the actuators or, alternatively, the apparatus may operate in an open loop manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.