Switches and switching arrays that use microelectromechanical devices having one or more beam members that are responsive to temperature
US6407478B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2001 |
| Grant date | Jun 18, 2002 |
| Priority date | — |
| Expiry date | Aug 21, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2061/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectromechanical device comprises first and second beam members that have respective first ends connected to anchors, and that are also connected together. The first and second beam members are connected to a dielectric tether by a first tether anchor. The microelectromechanical device further comprises a third beam member that has a first end that is connected to an anchor and that is connected to the dielectric tether by a second tether anchor. At least one of the first and the second beam members are configured to elongate when the first and/or the second beam member is heated to a temperature that is greater than a temperature of the third beam member.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.