Piezoelectric vibrator
US6407485B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 28, 2000 |
| Grant date | Jun 18, 2002 |
| Priority date | — |
| Expiry date | Jan 28, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/215
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric vibrator has a piezoelectric vibration plate having a piezoelectric vibration piece. First and second oscillation electrode films are disposed on the piezoelectric vibration plate for undergoing oscillating movement to vibrate the piezoelectric vibration plate. Each of the first and second oscillation electrode films terminates in a bonding film portion. A pair of cover members form a hermetically sealed cavity containing the piezoelectric vibration piece of the piezoelectric vibration plate. The cover members are anodically bonded together through the bonding film portions of the first and second oscillation electrode films. Each lead electrode of a pair of lead electrodes has a portion connected to a respective one of the bonding film portions of the first and second oscillation electrode films.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.