Method for cleaning phosphorus from an MBE chamber
US6408860B1 · kind B1 · utility
1Cited by
6References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2000 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Jan 10, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/564
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for cleaning phosphorus from a MBE vacuum chamber by freezing the panel (22) placed within the vacuum chamber (10) onto which excess phosphorus is deposited. The panel is connected to a source of cold nitrogen (24) which cools the panel. Water is introduced after the panels are cooled so as to form a layer of ice on top of the phosphorus. The panel may then be removed for cleaning with ice covering the phosphorus without danger of ignition of the phosphorus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.