Patent · US Expired

Vacuum pump

US6409477B1 · kind B1 · utility

7Cited by

8References

6Claims

0Family size

Assignee

PFEIFFER VACUUM · FR

Inventors

Armin Blecker · Aßlar, DE
Wolfgang Eberl · Solms, DE
Heinrich Lotz · Wetzlar, DE
Heinz Reichhart · Katzenelnbogen, DE

Key dates

Filing date	Jul 5, 2000
Grant date	Jun 25, 2002
Priority date	—
Expiry date	Jul 5, 2020

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF04D23/008
WIPO fieldEngines, pumps, turbines
WIPO sectorMechanical engineering

Abstract

A vacuum pump including suction and discharge regions, two gas friction pumps arranged on opposite side of the suction region and parallel to each other and each having at least one stage and a discharge region channels connecting the discharge regions and providing for gas flow from the discharge regions into a common discharge region of the two gas friction pumps, and a multi-stage pump located downstream of both gas friction pumps for compressing the gas flowing through the multi-state pump and having a suction region and a discharge region connected with the discharge region of the vacuum pump, with gas flowing into the suction region from the common discharge region of the two gas friction pumps.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.