Cooling system for cathodic arc cathodes
US6409898B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2001 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Mar 28, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32724
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for cathodic arc coating is provided. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target connected to the power supply. The cathode target has a channeled back surface for improving heat transfer from the cathode target. In the preferred embodiment, the cathode target also includes a conductor segment connecting the cathode target to the power supply of the cathodic arc coating apparatus for conducting the increased current capacity of the cathode target and a cooling block in contact with the cathode target to further improve the heat transfer from the cathode target.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.