Apparatus for supplying ozonated ultrapure water
US6409918B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 4, 1998 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Nov 4, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S210/90
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
An ozonated ultrapure water supply system that prevents reduction of the dissolved ozone concentration in the supply pipe system and maintains the dissolved ozone at points of use along the supply system at desired concentrations. This permits the system to supply ozonated water in long pipes. The system includes a sequential arrangement of a circulatory main pipe 3 for supplying ultrapure water, an ozonated gas supplying device 4, and at least two output branch lines 8 each having a gas/liquid separation device 9 and an ultimate point of use 7. The output branch lines are spaced downstream from the ozonated gas supplying device such that the ozone concentration in the ultrapure water has increased to a stable level and the ozonated ultrapure water at each output branch line is at this same stable ozone concentration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.