Deposition of pyrocarbon
US6410087B1 · kind B1 · utility
19Cited by
18References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 1, 1999 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Nov 1, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/442
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Pyrolytic carbon of extremely uniform crystalline characteristics and essentially free of discontinuities is obtained in a fluidized bed coater by creating an asymmetric recirculation of the fluidized bed within the high temperature coating chamber. Through the use of any of a variety of gas injection schemes, fluidizing/coating gas mixtures are injected through the three-dimensionally curved concave bottom surface of the coater to create a pattern where the fluidized bed ascends within about one-half of the volume of the coater and then spills over to become a descending bed in the other half.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.