Semiconductor device, display apparatus using such devices and method of manufacturing such an apparatus as well as that of manufacturing such an apparatus
US6411349B1 · kind B1 · utility
10Cited by
11References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 23, 1998 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Oct 23, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device comprises a contact hole for connecting electroconductive films having a stepped profile with the top having a size greater than the bottom, the top size of the contact hole being defined in a self-aligning manner by another film disposed between said electroconductive films.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.