Patent · US Expired

Microelectromechanical mechanisms for real-time mechanical vibration signature monitoring and analysis

US6412131B1 · kind B1 · utility

16Cited by
7References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 22, 2000
Grant dateJul 2, 2002
Priority date
Expiry dateFeb 22, 2020

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2291/106
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A MEMS-based system that enables low cost, low power, single chip realization of real-time signal detection and fault diagnosis. The system is suitable for analyzing the time-varying properties of a signal that are important for condition-based monitoring of electro-mechanical machines or structures. The system includes mechanical sensors that sense input signals such as vibration, signal templates of fault conditions, logic units that detect, store, and compare signal features to provide a diagnostic state, and an output readout mechanism to couple the diagnostic state to readout device that provides an external signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.