Microelectromechanical mechanisms for real-time mechanical vibration signature monitoring and analysis
US6412131B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2000 |
| Grant date | Jul 2, 2002 |
| Priority date | — |
| Expiry date | Feb 22, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/106
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS-based system that enables low cost, low power, single chip realization of real-time signal detection and fault diagnosis. The system is suitable for analyzing the time-varying properties of a signal that are important for condition-based monitoring of electro-mechanical machines or structures. The system includes mechanical sensors that sense input signals such as vibration, signal templates of fault conditions, logic units that detect, store, and compare signal features to provide a diagnostic state, and an output readout mechanism to couple the diagnostic state to readout device that provides an external signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.