Patent · US Expired

Extended range diaphragm valve and method for making same

US6412751B1 · kind B1 · utility

9Cited by
7References
21Claims
0Family size

Assignee

Inventor

Key dates

Filing dateApr 20, 2000
Grant dateJul 2, 2002
Priority date
Expiry dateApr 20, 2020

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF16K2099/0084
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

An improved micro-machined valve assembly includes a valve diaphragm that will not adhere to a valve seat during elevated temperature operation. In one embodiment, a portion of the diaphragm that is susceptible to adhering to the valve seat at elevated temperature is removed in the region where the diaphragm contacts the valve seat. In another embodiment, the valve diaphragm includes a metal layer applied to the portion of the diaphragm that comes into contact with the valve seat during operation of the valve. The metal layer extends the operating temperature of the valve by preventing adhesion of the diaphragm to the valve seat during high temperature operation. Selection of an appropriate material for the metal layer can improve chemical inertness of valve, thereby reducing the possibility that the material flowing through the valve will react with the metal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.