Self-aligned fuse structure and method with dual-thickness dielectric
US6413848B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2000 |
| Grant date | Jul 2, 2002 |
| Priority date | — |
| Expiry date | Mar 23, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided are a self-aligned semiconductor fuse structure, a method of making such a fuse structure, and apparatuses incorporating such a fuse structure. The fuse break point, that point at which the electrical link of which the fuse is part is severed by a laser beam, is self-aligned by the use of photolithographically patterned anti-reflective dielectric coatings. The self-alignment allows the size location of the break point to be less sensitive to the laser beam size and alignment. This has several advantages including allowing photolithographic control and effective size reduction of the laser spot irradiating the fuse material and surrounding structure. This permits reduced fuse pitch, increasing density and the efficiency of use of chip area, and results in reduced thermal exposure, which causes less damage to chip. In addition, laser alignment is less critical and therefore less timely, which increases throughput in fabrication.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.