Turbo molecular pump
US6416290B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 4, 1999 |
| Grant date | Jul 9, 2002 |
| Priority date | — |
| Expiry date | Oct 4, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF05D2260/607
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
To reduce losses by exerting the exhaustion performance to the full extent when a temperature of a rotor blade is within an allowable value, and to lower a variation in an r.p.m. of a turbomolecular pump even with a change in the gas load to maintain the exhaustion performance. Further to prevent deterioration of the rotor blade caused by a heat generation when a temperature of a rotor blade exceeds an allowable value.A driver output set r.p.m. determining unit 5 determines a driver output which can be exerted to the maximum or a set r.p.m., in response to signals of rotor blade temperature sensor 1, an r.p.m. sensor 2, a motor current sensor 3, and an axial electromagnet current sensor 4 when the temperature of the rotor blade is within an allowable value. A driver output switching unit 6 changes over a turbomolecular pump driving output of a motor driver 8, in response to the signal of the driver output set r.p.m. determining unit 5. Further, an r.p.m. compensating unit 7 changes a driving r.p.m. of a turbomolecular pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.