Carbon-enhanced fluoride ion cleaning
US6416589B1 · kind B1 · utility
7Cited by
14References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 18, 1999 |
| Grant date | Jul 9, 2002 |
| Priority date | — |
| Expiry date | Feb 18, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B7/0035
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and system for cleaning a metal article. The system is used to employ a method that comprises placing the article in a means defining a chamber; subjecting the article to a gaseous atmosphere in the means defining a chamber, where the gaseous atmosphere consisting essentially of carbon, hydrogen, and fluorine; and subjecting the article to the gaseous atmosphere at a temperature in a range from about 815° C. to about 1100° C. to clean the article.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.