Micro electromechanical isolator
US6417743B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 21, 1999 |
| Grant date | Jul 9, 2002 |
| Priority date | — |
| Expiry date | Sep 21, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/462
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The present invention relates to a micro electromechanical (MEM) isolator in which an input signal induces an output signal by means of electrically insulating mechanical motion. The MEM isolator device comprises a dielectric moveable platform suspended above a substrate by flexible beams. A drive and a control capacitor each have one electrode supported by the platform and one electrode supported by the substrate. Coupling between electrical and mechanical energies is achieved by providing an input signal to the drive capacitor to induce platform motion. When the input signal is fed to the drive capacitor, it actuates electrostatic motion of the platform resulting in a change in the value of the control capacitance. The change in the control capacitance is converted via a simple electronics circuit into an output that mirrors the input but is electrically isolated therefrom. The advantages of such a device include simple electrical isolation provided by the dielectric platform, built in signal-debounce inherent to the structure mechanics, and economical integration with silicon integrated circuits.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.