System for analyzing trace amounts of impurities in gases
US6418781B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 8, 1999 |
| Grant date | Jul 16, 2002 |
| Priority date | — |
| Expiry date | Dec 8, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N30/7206
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An analyzing apparatus for assaying various kinds of trace impurity contents in various kinds of high-purity gases, having an atmospheric pressure ionization mass spectrometer useful for determination of trace impurity contents in such high-purity gases on the ppb to sub ppb levels and a gas chromatograph integrated therewith, enabling high efficiency determination of trace impurity contents in high-purity gases. The analyzing apparatus having a gas chromatograph (8) and an atmospheric pressure ionization mass spectrometer (6), is provided with a system (10) for introducing a sample gas introduced from a sample gas introduction source directly to the atmospheric pressure ionization mass spectrometer (6); a system (14a, 14b) for introducing the sample gas via the gas chromatograph (8) to the atmospheric pressure ionization mass spectrometer (6); and a channel selector (11, 13, 15) for changing over the channel of the sample gas to either of these two systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.