Indexer for magazine shelves of a magazine and wafer-shaped objects contained therein
US6419439B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 26, 1996 |
| Grant date | Jul 16, 2002 |
| Priority date | — |
| Expiry date | Jul 26, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/113
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An indexer for magazine shelves of a magazine and wafer-shaped objects contained therein has the object of ensuring accurate access in any desired and predeterminable magazine plane, also for magazines which are provided with an opening on only one removing and charging side, by means of an all-purpose indexing, wherein it is possible to differentiate between various standardized magazine and wafer formats. The magazine shelves and the wafer-shaped objects are detected by an optoelectronic sensor arrangement, at least a portion of which is designed as a distance measuring system. The indexer is applicable in the manufacture of integrated circuits, in particular, for handling wafer-shaped objects in the form of semiconductors and masks.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.