Method for monitoring alternating current discharge on a double electrode and apparatus

US6420863B1 · kind B1 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

• Falk Milde · Dresden, DE
• Torsten Winkler · Radeberg, DE
• Andreas Fickert · Zwickau, DE
• Volker Kirchhoff · Dresden, DE
• Matthias Fahland · Dresden, DE

Key dates

• Filing date: Jun 21, 2000
• Grant date: Jul 16, 2002
• Expiry date: Jun 21, 2020

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05H1/0081
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

Process for monitoring an alternating-voltage discharge between the electrodes of a double electrode and an apparatus. The process includes measuring values of at least one of a discharge current and a discharge voltage for each half-wave within an alternating-voltage discharge period, determining a difference between the measured values of a second half-wave and the measured values of the first half-wave, and comparing the determined differences to specific tolerance values. When the specific tolerance values are exceeded by the determined differences, a power supply is reduced, whereby the discharge is at least briefly suppressed. The apparatus includes a double magnetron including first and second targets arranged to form a double electrode, and a power supply coupled to supply power to the first and second targets. The power supply includes a measurement unit for measuring values of at least one of discharge current and discharge voltage, such that at least one of a discharge current and a discharge voltage for each half-wave within an alternating-voltage discharge period is measured. A device for determining a difference between the measured values of a second half-wave and th…